ON POSSIBILITY OF DRAIN OF DOPANT IN A MULTILAYER STRUCTURE TO INCREASE HOMOGENEITY OF DISTRIBUTION OF THE DOPANT’S CONCENTRATION. International Journal of Materials Engineering and Technology, [S. l.], v. 23, n. 1, p. 81–100, 2024. DOI: 10.17654/0975044424005. Disponível em: https://pphmjopenaccess.com/ijmet/article/view/2028. Acesso em: 5 jan. 2026.