“ON POSSIBILITY OF DRAIN OF DOPANT IN A MULTILAYER STRUCTURE TO INCREASE HOMOGENEITY OF DISTRIBUTION OF THE DOPANT’S CONCENTRATION”. International Journal of Materials Engineering and Technology 23, no. 1 (June 28, 2024): 81–100. Accessed January 5, 2026. https://pphmjopenaccess.com/ijmet/article/view/2028.